Microfabrication Technology

Course Description

In this course, Prof. Clark Tu-cuong Nguyen covers topics ranging from: Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.

Microfabrication Technology
The construction of a metal–oxide–semiconductor field-effect transistor (MOSFET).
Not yet rated

Comments

There are no comments. Be the first to post one.
  Post comment as a guest user.
Click to login or register:
Your name:
Your email:
(will not appear)
Your comment:
(max. 1000 characters)
Are you human? (Sorry)
 
Disclaimer:
CosmoLearning is promoting these materials solely for nonprofit educational purposes, and to recognize contributions made by University of California, Berkeley (UC Berkeley) to online education. We do not host or upload any copyrighted materials, including videos hosted on video websites like YouTube*, unless with explicit permission from the author(s). All intellectual property rights are reserved to UC Berkeley and involved parties. CosmoLearning is not endorsed by UC Berkeley, and we are not affiliated with them, unless otherwise specified. Any questions, claims or concerns regarding this content should be directed to their creator(s).

*If any embedded videos constitute copyright infringement, we strictly recommend contacting the website hosts directly to have such videos taken down. In such an event, these videos will no longer be playable on CosmoLearning or other websites.