Chemical Film Deposition: LPCVD 
Chemical Film Deposition: LPCVD
by UC Berkeley / Clark Nguyen
Video Lecture 8 of 22
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Views: 688
Date Added: January 19, 2015

Lecture Description

This video lecture, part of the series Microfabrication Technology by Prof. Clark Nguyen, does not currently have a detailed description and video lecture title. If you have watched this lecture and know what it is about, particularly what Electrical Engineering topics are discussed, please help us by commenting on this video with your suggested description and title. Many thanks from,

- The CosmoLearning Team

Course Index

Course Description

In this course, Prof. Clark Tu-cuong Nguyen covers topics ranging from: Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.


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