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Course
Code:
EE 143
Subject:
Electrical Engineering
Views:
36,380
Educator
Name:
University of California, Berkeley (UC Berkeley)
Type:
University
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Instructor
Name
Clark Nguyen
Microfabrication Technology
Video Lectures
Displaying all 22 video lectures.
Lecture 1
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Process Integration
Lecture 2
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Layout to Cross-Section, Design Rules
Lecture 3
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Lithography I: Radiation Sources, Mask
Lecture 4
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Lithography II: Optics, Resolutions
Lecture 5
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Oxidation I: Thermal Oxidation
Lecture 6
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Oxidation II: Theory and Graphs, Dopant Redistribution
Lecture 7
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Physical Film Deposition: Evaporation
Lecture 8
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Chemical Film Deposition: LPCVD
Lecture 9
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Etching I: Anisotropy
Lecture 10
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Ion Implantation I: Etching II - Plasma & Reactive Ion (RIE)
Lecture 11
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Ion Implantation I: Range & Dry Etching
Lecture 12
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Ion Implantation II: I/I Through
Lecture 13
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Diffusion I: Predeposition & Drive-in Modeling
Lecture 14
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Diffusion II: 2-Step Diffusion
Lecture 15
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Diffusion III: Series Resistance
Lecture 16
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Diffusion IV: Interconnects, Contacts
Lecture 17
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Metal MEMS, Adv. CMOS I
Lecture 18
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Adv. CMOS II: Process Flow
Lecture 19
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Adv. Isolation: Problems w/ LOCOS
Lecture 20
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Device Characterization I: MOS-CV
Lecture 21
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Vt Implant: Threshold Voltage
Lecture 22
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Device Characterization II: MOS Device
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Subject: Electrical Engineering
Courses
Microfabrication Technology